Study of First-Order Thermal Sigma-Delta Architecture for Convective Accelerometers

نویسندگان

  • Olivier Leman
  • Frédérick Mailly
  • Laurent Latorre
  • Pascal Nouet
چکیده

This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This “electrophysical” modulator realizes an analog-to-digital conversion of the signal. Besides the feedback scheme should improve the sensor performance.

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عنوان ژورنال:
  • CoRR

دوره abs/0805.0920  شماره 

صفحات  -

تاریخ انتشار 2008